Introduction to Mechatronics principles, MEMS and Microsystems, Data Acquisition, Operational Amplifiers, Microcontrollers and Microprocessors, Signal Processing, FFT, Vibrating MEMS, Gyroscopes, Accelerometers, Band-Pass Filters, Sensing and Actuation, Electro thermal, Piezoelectri, Electromagnetic, Peizoresistive, Electrostatic, Elements of Lumped- Parameter Modeling, Stiffness Elements, Spring-Mass Models, Damping in MEMS, Introduction to Nonlinear Modeling, Fixed Points and Linearization, Bifurcations of Fixed Points, Phase Portraits, Nonlinear Oscillations, Case Studies: Capacitive RF Switches, AFM, Torsional Actuators and Micromirrors.