ECE 205 Introduction to MEMS

Micro electro mechanical systems (MEMS), devices and technologies. Micro-machining and microfabrication techniques, including planar thin-film processing, silicon etching, wafer bonding, photolithography, deposition and etching. Transduction mechanisms and modeling in different energy domains. Analysis of micro machined capacitive, piezo resistive and thermal sensors/actuators and applications. Computer-aided design for MEMS layout, fabrication and analysis.