ECE 305 Advanced MEMS Devices and Technologies

Advanced micro electro mechanical systems (MEMS) devices and technologies. Transduction techniques, including piezoelectric, electro thermal and resonant techniques. Chemical, gas and biological sensors; microfluidic and biomedical devices. Micromachining technologies such as laser machining and micro drilling, EDM, materials such as SiC and diamond. Sensor and actuator analysis and design through CAD.




ECE 205